Advanced Energy Industries, a provider of power conversion for thin-film deposition, is introducing its enhanced pulsing technology suite at the 57th annual SVC TechCon 2014 conference in Chicago.
The Advanced Energy (AE) pulsing lineup brings precision power delivery to small- and large-area industrial vacuum coating applications, such as glass, flat panel display, AMOLED display, hard coatings and optical coatings.
Enabling the next wave of innovation, the newest DC and RF power conversion systems from the company offer advanced integrated pulsing options—including controlled voltage reversal, standard pulsing, bipolar pulsing, bias pulsing and arc pulsing, as well as synchronized pulsing between bias and arc sources.
The solutions on display include Ascent AMS and DMS, as well as Pinnacle Plus+ DC power-delivery systems; Solvix DC and pulsed-DC power delivery systems; Paramount RF power delivery system; Navio digital matching network; Sekidenko OR4000T optical fiber thermometer (OFT) and OR400M optical pyrometer; and Power controller modules (SCRs).
With AE’s controlled, precise, shaped power delivery, process engineers can tailor surface properties while maintaining high deposition rates more efficiently, AE said.
Designed to deliver 30 to 180 kW of bipolar power—with independent power control to each cathode—the Ascent AMS and DMS power conversion products include a dynamic control system, extremely fast arc handling and the lowest stored energy in the industry.
Despite the advanced feature set, the Ascent AMS and DMS products offer industry-leading cost of ownership through the customized duty cycle management of power to each target for increased target-erosion uniformity and full utilization of each cathode, the company said. This results in longer campaigns and improved bottom line.
Yuval Wasserman, president of precision power, said, “The Ascent AMS and DMS products are truly game changers for precision power conversion, offering state-of-the art features, lowest cost of ownership and flexible operating modes for those customers that simply want to plug-and-run or those that wish to optimize the configurable settings for maximum power delivery and ROI. Stable processes, higher quality films and low cost of ownership equate to a strong return on investment.”